SOLO e DRIVE
PUMP SYSTEM FOR RESIST AND OTHER LIQUID CHEMICALS
Fully electronic programmable system RESIST DISPENSE PUMP
The patented ON-nano Pump system is designed for highest dispense repeatability during the process and does not require sensor systems.
A simple hydraulic dispense mechanism ensures stress-free dispensing with any liquid. An automatic degassing before the pump eliminates micro-bubbles in the resist.
- Suggested for viscosity material: low – 20.000 cPs (two versions availably)
- Dispense from .05 ml up to 150ml (250ml)
- Dispense speed and volume programmable
- Integrated degassing system before dispense
- Temperature dispense -30°C up to +50°C (-22°F up to 122°F)
- Resist-bottle exchange automatic
- Suck-back programmable.
- 100% consumption of the resist from the bottle.
- All parts in PFA or Teflon
SOLO p PUMP
PNEUMATIC PUMP V10
The pneumatic Pump system is designed for dispense photoresist
- Suggested for low viscosity material
- Dispense from .5ml up to 10ml
- Dispense speed and volume adjustable
- Easy to use and adjust need CDA and Vacuum to dispense 24 volt 1 amp
- All control are implemented in the pump
- Point of use Suck-back valve adjustable
CDA 6 bar
vacuum 0.6 bar
24volt input 1 amp
24volt trigger signal